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不同Al/Cu缓冲层比例下SiC MOSFET功率模块在功率循环中退化特性的对比分析
Comparative Analysis of Degradation of SiC MOSFET Power Module With Different Proportions of Al/Cu Buffer Under Power Cycling
| 作者 | Yunhui Mei · Songmao Zhang · Yuan Chen · Longnv Li · Daohang Li · Yongqi Pei |
| 期刊 | IEEE Transactions on Components, Packaging and Manufacturing Technology |
| 出版日期 | 2025年2月 |
| 技术分类 | 储能系统技术 |
| 技术标签 | 储能系统 SiC器件 功率模块 |
| 相关度评分 | ★★★★★ 5.0 / 5.0 |
| 关键词 | 碳化硅功率模块 键合线可靠性 铝铜缓冲层 烧结银技术 功率循环测试 |
语言:
中文摘要
由于碳化硅(SiC)芯片与键合线之间的热膨胀系数(CTE)不匹配,键合界面处会产生严重的热机械应力,导致键合线的可靠性显著降低。通过使用烧结银在芯片顶部连接铝/铜缓冲层,可以改善键合线与芯片之间的热膨胀系数不匹配问题,大大提高键合线的可靠性。缓冲层与银烧结技术的结合显著提高了功率模块的可靠性并增强了功率密度。此外,缓冲层增加了热容量,从而降低了半导体器件的工作温度。在本研究中,通过亚秒级功率循环测试(PCT)研究了不同比例的铝/铜应力缓冲层对采用铝键合线的单面模塑碳化硅功率模块可靠性的影响,并对键合线的失效模式进行了表征。结果表明,带有铝/铜应力缓冲层的模块中,键合线的失效点位于键合线根部的开裂处。在具有良好导电性的10微米铝/40微米铜缓冲层中,采用该缓冲层的模块具有更长的使用寿命。
English Abstract
Due to the mismatch in coefficient of thermal expansion (CTE) between the SiC chip and the bonding wire, there is a sever thermal-mechanical stress at the bonding interface, causing a significant reduction in the reliability of the bonding wire. By using sintered silver to connect an Al/Cu buffer layer at the top of the chip, the mismatch in CTE between the bonding wire and the chip can be improved, greatly enhancing the reliability of the bonding wire. The integration of the buffer layer with Ag sintering technology significantly improves the reliability of power modules and enhances power density. Furthermore, the buffer layer increases the thermal capacity, thereby reducing the operating temperature of the semiconductor device. In this study, the effects of different Al/Cu stress buffer layers with different proportions on the reliability of the single-sided molded SiC power module with Al bonding wire were investigated through subsecond power cycling tests (PCTs), and the failure modes of the bonding wire were characterized. The results show that the failure point of the bonding wire in the module with an Al/Cu stress buffer layer is located at the cracking of the bonding wire heel. Among the 10- m Al/40- m Cu buffer layers with good electrical conductivity, the module with this buffer layer has a longer lifetime.
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SunView 深度解读
从阳光电源业务视角来看,这项关于SiC MOSFET功率模块中Al/Cu缓冲层的研究具有重要的战略意义。SiC器件是我们光伏逆变器和储能变流器实现高功率密度、高效率的核心技术,而键合线可靠性一直是制约产品寿命的关键瓶颈。
该研究通过在芯片顶部采用银烧结技术集成Al/Cu缓冲层,有效缓解了SiC芯片与键合线之间的热膨胀系数失配问题,这对我们的产品开发具有三方面价值:首先,功率循环测试显示10μm Al/40μm Cu配比的缓冲层方案可显著延长模块寿命,这直接支撑我们储能系统和大功率逆变器产品实现25年以上的设计寿命目标;其次,缓冲层增加的热容量可降低器件工作温度,有助于提升系统在高温环境下的可靠性,这对我们拓展中东、澳洲等高温市场至关重要;第三,银烧结+缓冲层技术组合提升功率密度的特性,能够帮助我们在1500V高压系统和储能集成产品中实现更紧凑的设计。
从技术成熟度评估,银烧结技术已在车规级功率模块中应用,但Al/Cu缓冲层的工艺集成仍需验证长期可靠性和成本可控性。建议我们与封装供应商开展联合开发,重点关注缓冲层厚度优化、界面结合强度以及在实际工况下的失效模式验证。该技术若成功导入,将强化我们在高可靠性功率电子领域的竞争优势,支撑新一代超高功率组串逆变器和液冷储能系统的产品迭代。