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功率器件技术 宽禁带半导体 功率模块 ★ 4.0

具有0.85 GW/cm²巴利加优值或5A/700V处理能力的β-Ga2O3结势垒肖特基二极管演示

Demonstration of β-Ga2O3 Junction Barrier Schottky Diodes With a Baliga's Figure of Merit of 0.85 GW/cm2 or a 5A/700 V Handling Capabilities

语言:

中文摘要

本文报道了首个垂直结构β-Ga2O3结势垒肖特基(JBS)二极管。通过引入热氧化p型NiO层,有效解决了β-Ga2O3缺乏p型掺杂的难题。实验表明,该器件在100×100 μm²面积下实现了1715V的击穿电压,展现了极高的功率处理潜力。

English Abstract

In this article, we report on demonstrating the first vertical β-Ga2O3 junction barrier Schottky (JBS) diode with the implementation of thermally oxidized p-type NiO to compensate for the dilemma of the forfeit of the p-type β-Ga2O3. With this wide-bandgap p-type NiOx, β-Ga2O3 JBS diodes with an area of 100 × 100 μm2 achieve a breakdown voltage (BV) and specific on-resistance Ron,sp of 1715 V and ...
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SunView 深度解读

氧化镓(β-Ga2O3)作为超宽禁带半导体,其击穿场强远超SiC和GaN,在未来高压、高功率密度电力电子应用中具有巨大潜力。对于阳光电源而言,该技术若实现产业化,将显著提升光伏逆变器和储能变流器(PCS)的功率密度,并降低损耗。建议研发团队密切跟踪其垂直器件工艺成熟度,重点关注其在未来高压组串式逆变器及PowerTitan储能系统功率模块中的应用前景,以保持在下一代功率转换技术中的竞争优势。