硅基氮化铝环形微谐振器及其在串联谐振变换器中的应用可行性

Microelectromechanical systems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. The main intention of this paper is to present a ring-shaped aluminum nitride (AlN) piezoelectric microresonator that can be used as an energy-transferring device to replace inductors/capacitors in low-power resonant converters for biomedical applications. Fini...