用于片上电源的镍锌铁氧体磁芯集成MEMS环形变压器

A miniature integrable transformer is an obstacle to the miniaturization of packaged power supply on chip (PwrSoC). This letter introduces a through-silicon via (TSV) high-aspect-ratio toroidal transformer manufactured using microelectro-mechanical systems and electroplating. The primary coil and secondary coil of the transformer are interleaved on the toroidal core cavity, which is entirely wrapp...