基于两级螺杆驱动的谐振式直线压电平台研制：实现纳米级分辨率与高输出力

High-performance linear piezoelectric platform is the core equipment for micro-nano manipulation and ultra-precision manufacturing. A novel resonant linear piezoelectric platform (RLPP) with dimensions of Φ60 mm × 76.5 mm is proposed, whose prominent feature is that it achieves bidirectional linear output motion with nanometer resolution, high output force, and self-locking at power-off by two-staged screws. It is actuated by a bending hybrid piezoelectric actuator (BHPA) with the structure of a cantilever beam that can operate in two bending vibration modes. Moreover, the BHPA has the advantage of high output force due to double traveling wave actuation compared with the traditional barrel screw one. The two working modes and double traveling wave actuation are analyzed and verified through theoretical analysis and finite element simulation. The proposed RLPP is manufactured to investigate its vibration performances and output characteristics. Experiments demonstrate that the maximum output force of the prototype can reach about 72 N at a voltage of 300 Vp-p and a frequency of 24.2 kHz. Furthermore, the proposed platform achieves a high displacement resolution of 40 nm by two-staged screws, which provides an effective solution for high-performance linear manipulation.