基于固定梁的MEMS微波功率检测芯片及其模型

In order to solve the problems of low overload power in MEMS cantilever beams and low sensitivity in traditional MEMS fixed beams,a novel MEMS microwave power detection chip based on the dual-guided fixed beam is designed.A gap between guiding beams and measuring electrodes is designed to accelerate the release of the sacrificial layer,effectively enhanc-ing chip performance.A load sensing model for the MEMS fixed beam microwave power detection chip is proposed,and the mechanical characteristics are analyzed based on the uniform load applied.The overload power and sensitivity are investi-gated using the load sensing model,and experimental results are compared with theoretical results.The detection chip exhibits excellent microwave characteristic in the 9-11 GHz frequency band,with a return loss less than-10 dB.At a signal fre-quency of 10 GHz,the theoretical sensitivity is 13.8 fF/W,closely matching the measured value of 14.3 fF/W,with a relative error of only 3.5%.These results demonstrate that the proposed load sensing model provides significant theoretical support for the design and performance optimization of MEMS microwave power detection chips.