一种用于准分子激光电源的改进型全固态混合储能脉冲电路

Excimer lasers, utilized in advanced semiconductor industries such as deep ultraviolet lithography, have been developed toward higher power outputs, which necessitates increased maximum repetition frequency and output voltage amplitude from their power supplies. This article proposes a hybrid energy storage method achieved by extending the IGBT turn-on time in the voltage multiplication circuit. T...