一种基于多矩阵网络的兆赫兹多模块并联逆变系统

As key subsystem of the semiconductor etching system, the multimodule megahertz inverter needs to modulate power through load differences efficiently and accurately, however, losses of resonant inverter modules are reduced only within narrow load range. The existing inverters often fail to mathematically resolve the conflict between power range and efficiency range. This article proposes a method ...